We offer “ Repair, Overhaul , Upgrade & Software Backup/ Upgrade, On-site Technical Support/ Training” on the following Metrology System.

1.  KLA Tencor Prometrix Omnimap RS 35, 50, 55, 75, 100 & VP 10.
2.  KLA Tencor Prometrix UV 1050, UV 1250, UV 1080, UV 1280.
3.  KLA Tencor Surfscan 6200, 6220,6400, 6420, SP1-TBI, SFS SP1 DLS.
4.  KLA Tencor Profiler Alpha Step 500/ Alpha Step IQ/ P-11/ P-10/ P-20.
5.  KLA Tencor Surface Defect Inspection System AIT II, AIT-XUV.
6.  KLA-Tencor Overlay Measurement System 5200XP, 5300, Archer 5.  
7.  Thermawave Opti Probe 2600, 2690, 5240…
8.  Nanometrics Nanospec 3000, 6100..
9.  Auto Spreading Resistance Probe SSM150..

9.  Thickness Measurement & Reflectance Measurement AFT 180, 200, 210..

Parts Supply related to the above machine.

  • Laser Head for SFS 6200, 6220 ec.
  • Spare Parts for SRP SSM150
  • KLA ASM Assy’ for Overlay 5200, 5300 etc.

Tencor RS-35c Resistivity Mapping System

Tencor P-1 Surface Profiler

 

Tencor Surfscan 6200 Wafer Inspection System

 

Prometrix-OmniMap RS-35e Resistivity Mapping System

 

Prometrix VP-10e Resistivity Mapping System

 

KLA TENCOR PROMETRIX UV 1050